| 摘要 |
A non-contact three-dimensional probing system based on a spherical capacitive plate has a probe including a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7). The active shielding pipe (8) is driven by the signal converting and processing circuit (13) of the probing system to maintain equipotential with the signal conducting rod (7), and so the influence of parasitic capacitance and spatial electromagnetic interference can be eliminated. |
