| 摘要 |
PURPOSE: A method of manufacturing 3 shafts acceleration sensor is provided improve accuracy of device by simplifying the manufacture process, and to improve the operating reliability of device. CONSTITUTION: The photoresist for imprint is applied on the substrate(110). The photosensitive is patterned by using mask(200) for imprint so that photosensitive pattern, which has different heights, be formed in the photosensitive resin. The substrate is etched by processing etching process using photosensitive pattern, and form cantilever beam having different size within the substrate. |
