| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for a recovering treatment liquid capable of reducing treatment liquid that is taken into a rinsing tank and, thereby, reducing rinsing water by recovering the treatment liquid attached to a workpiece when pulling up the workpiece from a treatment tank. SOLUTION: Shower nozzles 3, 3 that jet washing water toward the workpiece are disposed on positions of sandwiching the workpiece W above the liquid level of the treatment tank 1, air jetting ports 5, 5 that jet air toward the workpiece are disposed above the shower nozzles 3, 3, and an enclosure 7 that surrounds the workpiece W, the circumference of a hanger 6 for hanging the workpiece W down is disposed above the treating tank 1, and such air cylinders 9, 9 that the enclosure 7 is freely extensible in the vertical direction, the upper end of a enclosure 7 during rising of a hanger 6 is raised to extend the enclosure and the upper end of a enclosure 7 upon the completion of the rising of the hanger 6 is lowered to contract the enclosure 7 are disposed. COPYRIGHT: (C)2011,JPO&INPIT
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