| 摘要 |
PURPOSE: An atmospheric plasma processing apparatus is provided to prevent the damage of a plasma electrode by replacing the plasma electrode before the life expectance of the plasma electrode is expired. CONSTITUTION: A plasma generating module(110) includes a plasma electrode for generating plasma. A substrate transferring part(120) is arranged at the lower side of the plasma generating module and transfers a substrate. A monitoring unit(130) monitors the life expectancy of the plasma electrode by measuring the surface roughness of the plasma electrode. The monitoring unit includes a sensor part and a calculating part. The sensor part is arranged at the opposite position of the plasma electrode. Based on the measured result of the sensor part, the calculating part calculates the life expectancy of the plasma electrode.
|
