| 摘要 |
PURPOSE: A sapphire heater is provided to prevent the damage of cleaning gas and implement a cleaning process at high temperature. CONSTITUTION: A resistance heating body(110) is embodied in a sapphire-based heater case(100). A current supplying part(120) supplies a driving current to the resistance heating body. The sapphire-based heater case is composed of a plurality of plates(101 to 106). The plates are bonded by a welding operation or an adhesive. A sapphire-based plate which faces the current supplying part is in a polished state. |
