| 摘要 |
PURPOSE:To control a flow rate accurately with a small-sized device by forming an entrance passage in the tangent direction of a valve chamber and putting a ball body on a generated turning flow to rotate it and arranging a control valve in the center. CONSTITUTION:Since an entrance passage 25 is provided in the tangent direction of a valve chamber 24, a fluid is flowed out from between a valve hole 26 and a valve rubber 30 while turning around a control valve 31 in the valve chamber 24, and this turning flow acts upon a ball body 42 in a ring 41 through gaps 45 of an enclosure 43, and the ball body 42 is rotated along the inside wall and the upper wall of the ring 41. The signal from a rotation detecting part 48 is sent to a control part 49, and an operation output is given to a motor 38 of a driving part 40 so that the difference from a target flow rate value is compensated. Thus, a device can be operated in the direction where the variance of the flow rate due to the variance of pressure or passage resistance is absorbed by correction of the degree of valve opening, and the flow rate value can be varied in accordance with a signal from the external, and further, the current flow rate can be transmitted to the external as a signal. |
