| 摘要 |
PURPOSE: An apparatus and a method for processing substrates are provided to prevent the generation of mist on a monitoring window by inhaling fume using an inhaling nozzle at a position adjacent to the monitoring mirror. CONSTITUTION: A processing chamber(111) includes a space(112) in which operational processes with respect to a substrate(11) are implemented. A monitoring window(116) monitors the inside of the processing chamber. A substrate supporting unit supports the substrate. A spraying nozzle(131) sprays chemical toward the substrate. A main pipe(163) exhausts fume generated in the processing chamber to the outside.
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