| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of preventing debris from sticking to a workpiece, wherein the debris is generated by irradiation of a laser beam guided in a liquid column. <P>SOLUTION: The laser beam machining apparatus is equipped with a cover liquid feeder by which a cover liquid is supplied to a workpiece to cover the upper face of the workpiece therewith. A machining head is composed of: a condensing lens for converging a laser beam generated by a laser beam generator; a liquid jetting tool that jets a liquid to the workpiece to form a liquid column through which the laser beam converged by the condensing lens is guided; an outer wall arranged so as to surround the liquid column for the purpose of controlling the inflow of the cover liquid into the machining point of the workpiece irradiated with the laser beam; a suction port arranged between the liquid column and the outer wall; and a sucking means including a sucking source connected to the suction port. The apparatus is characterized in that machining waste generated by the laser beam irradiation on the workpiece covered with the cover liquid is sucked together with the cover liquid by the suction tool and removed from the surface of the workpiece. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
