| 摘要 |
PROBLEM TO BE SOLVED: To provide a replica sampling method which can sample a replica film to which the metal tissue of the narrow part of an object is sharply transferred. SOLUTION: A replica is sampled by the process for selecting a first polishing implement 6A having plasticity and a buff material 6C in matching relation to the shape of the narrow part 4 of the object 2, the process for polishing the narrow part 4 by the first polishing implement 6A, the process for applying mirror surface polishing to the narrow part 4 by the buff material 6C after the polishing process using the first polishing implement 6A, the process for etching the polished surface 8 of the narrow part 4 subjected to the mirror surface polishing by the buff material 6C, the process for pasting the replica film 20 on the etched polished surface 8 to transfer the metal tissue of the polished surface 8 to the replica film 20, and the process for peeling the replica film 20, to which the metal tissue is transferred, from the polished surface 8. COPYRIGHT: (C)2011,JPO&INPIT
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