发明名称 APPARATUS FOR GENERATING BEAM ION
摘要 PURPOSE: An apparatus for generating beam ions is provided to determine a supply of power by attaching an electron beam generation module at a socket part of a main body. CONSTITUTION: One side of a socket part(600) is opened. The socket part includes an internal space formed therein. An electron beam generation module(100) is selectively coupled with an internal space of the socket part. The electron beam generation module is attached to or is detached from the inner space of the socket part. The electron generation module generates an electron beam by receiving the electric power from the outside. A power supply unit(700) provides the electric power to the electron beam module.
申请公布号 KR20110062757(A) 申请公布日期 2011.06.10
申请号 KR20090119584 申请日期 2009.12.04
申请人 SUNJE HI-TEK CO., LTD.;VACUUM SCIENCE & INSTRUMENT CO., LTD. 发明人 LEE, DONG HOON;JUNG, YONG CHUL;KIM, DO YUN;PARK, JAE WOO
分类号 H01J37/08;H01J29/48;H01J29/96 主分类号 H01J37/08
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