| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of electrostatic breakdown caused by the discharge of electric charges accumulated in a substrate. SOLUTION: The invention relates to a substrate liquid processing apparatus (1), a substrate liquid processing method for processing the substrate (2) with a liquid, and a computer-readable storage medium (48) having a substrate liquid processing program stored therein. Prior to processing a circuit-forming surface of the substrate (2) with the substrate processing chemical liquid, the substrate liquid processing apparatus performs an anti-static process for an surface opposite to the circuit-forming surface of the substrate (2) by an anti-static liquid, thereby emitting the electric charges on the substrate (2). COPYRIGHT: (C)2011,JPO&INPIT |
