Plasma thin film deposition system and it`s method for high wear resistance and low friction coefficient thin film deposition on components in automatic system and automobile,申请号KR20070125614-传众专利搜索

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发明名称	Plasma thin film deposition system and it`s method for high wear resistance and low friction coefficient thin film deposition on components in automatic system and automobile
摘要
申请公布号	KR101036333(B1)	申请公布日期	2011.05.25
申请号	KR20070125614	申请日期	2007.12.05
申请人		发明人
分类号	C23C16/50;C23C16/00	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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