发明名称 |
MEMS-BASED OPTICAL IMAGE SCANNING APPARATUS, METHODS, AND SYSTEMS |
摘要 |
Disclosed are MEMS-based optical image scanners and methods for imaging using the same. According to one embodiment, a 3-D scanner for endoscopic imaging is provided, which includes a MEMS mirror for 1-D or 2-D lateral scanning and a MEMS lens for scanning along the optical axis to control the focal depth. The MEMS lens can be a microlens bonded to a MEMS holder. Both the MEMS holder and the MEMS mirror can be electrothermally actuated. A single-mode fiber can be used for both delivering the light to and receiving the returning light from an object being examined. |
申请公布号 |
WO2011028595(A3) |
申请公布日期 |
2011.05.19 |
申请号 |
WO2010US46775 |
申请日期 |
2010.08.26 |
申请人 |
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION INC.;XIE, HUIKAI;LIU, LIN |
发明人 |
XIE, HUIKAI;LIU, LIN |
分类号 |
G01B11/24;B81B7/02 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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