OPTICAL ELEMENT FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS COMPRISING SUCH OPTICAL ELEMENT AND METHOD FOR MAKING THE OPTICAL ELEMENT,申请号EP20090780906-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	OPTICAL ELEMENT FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS COMPRISING SUCH OPTICAL ELEMENT AND METHOD FOR MAKING THE OPTICAL ELEMENT
摘要
申请公布号	EP2321703(A2)	申请公布日期	2011.05.18
申请号	EP20090780906	申请日期	2009.07.22
申请人	ASML NETHERLANDS BV	发明人	SJMAENOK, LEONID;BANINE, VADIM;MOORS, ROEL;GLUSHKOV, DENIS;YAKUNIN, ANDREI, MIKHAILOVICH
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SLIDING MODULE AND MOBILE TERMANAL HAVING THE SAME

METHOD OF FABRICATING BLACK MATRIX OF COLOR FILTER

PREPARATION METHOD OF VINYL CHLORIDE FROM METHANE

HORIZONTAL FURNACE EQUIPMENT AND DOOR CRASH PREVENTING METHOD USING THE SAME

SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

RF ANTENNA AUTOMATIC SELECTING DEVICE OF RF TERMINAL AND RF ANTENNA AUTOMATIC SELECTING METHOD

PRINTER DRIVER AND METHOD FOR FORMING OF PHOTO IMAGE

A TELEMETERING SYSTEM OF WATER GUAGE BASED ON COMMUNICATIONS NETWORK

HIGH SPEED LINE FOR BACKWARD MATCHING

OUTPUT SCREEN DESIGN METHOD OF BANK TERMINAL AND DISPLAY METHOD

ACTUATOR STRUCTURE OF AGCS

RADIO FREQUENCY RECEIVER OF BALANCE TYPE

LOCKING SYSTEM OF ROOF LACK CROSS BAR FOR VEHICLE

METHOD FOR CONSTRUCTION OF TUNNEL

APPARATUS AND METHOD FOR CONTROLLING NETWORK ENVIRONMENT

HIGH-EFFICIENT ORGANIC LIGHT EMITTING MATERIAL AND ORGANIC LIGHT EMITTING DIODE

MULTI-FUNCTION MP3 PLAYER

BAKING OVEN WITH A VAPOUR CHANNEL IN WHICH A CATALYST AND A GAS SENSOR ARE ARRANGED

MASTER BATCH BASED ON STYRENE BUTADIENE BLOCK COPOLYMERS