| 摘要 |
PURPOSE: A substrate processing apparatus is provided to completely pack the gap between a chamber body and a chamber cover by triple packing, thereby increasing process reliability. CONSTITUTION: A chamber body(100) provides a space for processing a substrate. A chamber cover(200) covers the space exposed by the chamber body. A packing member(300) is inserted into the junction part between the chamber body and the chamber cover. A packing member comprises a first packing member(310), a second packing member(320), and a third packing member(330). A substrate support unit(400) comprises a spin head(410) supporting a substrate during processes.
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