发明名称 |
ELECTRON MICROSCOPE WITH ELECTRON SPECTROMETER |
摘要 |
A lens adjustment method and a lens adjustment system which adjust a plurality of multi-pole lenses of an electron spectrometer attached to a transmission electron microscope, optimum conditions of the multi-pole lenses are determined through simulation based on a parameter design method using exciting currents of the multi-pole lenses as parameters.
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申请公布号 |
US2011095182(A1) |
申请公布日期 |
2011.04.28 |
申请号 |
US20110985708 |
申请日期 |
2011.01.06 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
TERADA SHOHEI;TANIGUCHI YOSHIHUMI;KAJI KAZUTOSHI |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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