| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of shortening a wait time and a cycle time to perform efficient processing. SOLUTION: In the substrate processing apparatus, a control unit sets some of fixed storage shelves 25a to 25f and displacement storage shelves 29a to 29e in a carry-in/out section 7 as "for processing" between a load port and a processing unit and also as "for storage" as stockers. Here, the control unit changes the rate thereof, so although an FOUP is temporarily carried to an external stocker before, the control unit 13 changes settings of the carry-in/out section 7 from "for processing" to "for storage" to eliminate the need to carry it. Therefore, the wait time and cycle time can be shortened to perform efficient processing. COPYRIGHT: (C)2011,JPO&INPIT
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