SUBSTRATE TREATING SYSTEM AND SUBSTRATE CONVEYING METHOD

摘要

PURPOSE: A substrate processing system and substrate conveying method are provided to improve processing capability by using a substrate conveying device which can more rapidly send back substrate. CONSTITUTION: A substrate conveying method is as follows. A plurality of forks(54a,54b) supports substrates and is vertically separated each other as a fixed distance. The substrates are out pulled from the first substrate accepting part one by one. All forks supporting the substrates are horizontally moved at the same time toward the loading position in order to deliver the substrate to a second substrate accepting part from the first substrate accepting part. The forks reverse from the respective second substrate receiving part by simultaneously performing the reversing motion of all forks.