PROCESS FOR BONDING AND TRANSFERRING A LAYER

摘要

PURPOSE: A process for bonding and transferring a layer on a substrate is provided to prevent the flaking and delaminating of a final substrate. CONSTITUTION: A laminate is formed by bonding a receiving substrate(2) with a donor substrate(1) through molecular adhesion. The laminate is thermally processed by reinforcing a bonding interface(5). The donor substrate is thinned by grinding. The donor substrate and the receiving substrate are annularly trimmed. The exposed surfaces of the receiving substrate and the residual part of the donor substrate are chemically etched.