| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface profile measuring method which can measure the surface profile of an object under measurement using a probe easily and with high precision. SOLUTION: The surface profile measuring method for measuring the surface profile of the object under measurement by moving the probe and the object under measurement relatively includes: a first acquisition process for acquiring first surface profile data in a first area of the object under measurement; a second acquisition process for acquiring second surface profile data in a second area of the object under measurement at least part of which overlaps with the first surface profile data; an approximate curve acquisition process S20 for acquiring an approximate curve by performing fitting with an approximate function on the data of the area overlapping with the second surface profile data out of the first surface profile data; a correction amount calculation process S30 for calculating a correction amount for the second surface profile data using the approximate curve; a coordinates conversion process S40 for performing coordinates conversion on the entire second surface profile data on the basis of the calculated correction amount; and a process for combining the first surface profile data and the second surface profile data on which the coordinates conversion has been performed. COPYRIGHT: (C)2011,JPO&INPIT |
