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发明名称
Device and method for aligning wafers on a flat support
摘要
申请公布号
EP2210271(B1)
申请公布日期
2011.03.30
申请号
EP20080856915
申请日期
2008.11.18
申请人
CENTRE NATIONAL D'ETUDES SPATIALES (C.N.E.S.)
发明人
PENQUER, ANTOINE;EHANNO, MICHEL
分类号
H01L21/68;H01L21/00
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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