| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus reducing the cost of an exhaust system. SOLUTION: The substrate processing apparatus includes a process chamber where a substrate is processed, a transfer chamber 12 provided with a transfer unit transferring the substrate to the process chamber, a plurality of decompressable spare chambers 14a, 14b coupled to the transfer chamber, an exhaust unit 50 connected to the spare chambers, a plurality of exhaust valves 61-63 respectively controlling exhaust of the spare chambers, second control means 89 controlling the exhaust valves, a plurality of exhaust valves 61-63 respectively controlling exhaust of the spare chambers, a second control means 89 controlling the exhaust valves, and a first control means 86 controlling the exhaust valves so that one of the exhaust valves is opened while the other exhaust valves are in a standing-by state to be opened. COPYRIGHT: (C)2011,JPO&INPIT
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