发明名称 |
TRANSPARENT CONDUCTIVE FILM HAVING FTO/ITO LAMINATE |
摘要 |
<p>A transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein a part or all of the crystal structure of a surface of the FTO film is orthorhombic, and a transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein the thickness of the FTO film is within a range from 5 nm to 20 nm and the FTO film is a continuous film. A method of producing the transparent conductive films includes depositing the ITO film on a substrate using a pyrosol process, and subsequently depositing the FTO film continuously on top of the ITO film.</p> |
申请公布号 |
EP2296154(A1) |
申请公布日期 |
2011.03.16 |
申请号 |
EP20090769887 |
申请日期 |
2009.06.22 |
申请人 |
NIPPON SODA CO., LTD. |
发明人 |
YAMADA, SHIGEO;OOASHI, TATSUYA |
分类号 |
C23C18/12;H01L31/0224;H01L31/18;H01L51/00;H01L51/44 |
主分类号 |
C23C18/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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