发明名称 TRANSPARENT CONDUCTIVE FILM HAVING FTO/ITO LAMINATE
摘要 <p>A transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein a part or all of the crystal structure of a surface of the FTO film is orthorhombic, and a transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein the thickness of the FTO film is within a range from 5 nm to 20 nm and the FTO film is a continuous film. A method of producing the transparent conductive films includes depositing the ITO film on a substrate using a pyrosol process, and subsequently depositing the FTO film continuously on top of the ITO film.</p>
申请公布号 EP2296154(A1) 申请公布日期 2011.03.16
申请号 EP20090769887 申请日期 2009.06.22
申请人 NIPPON SODA CO., LTD. 发明人 YAMADA, SHIGEO;OOASHI, TATSUYA
分类号 C23C18/12;H01L31/0224;H01L31/18;H01L51/00;H01L51/44 主分类号 C23C18/12
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