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发明名称
Feldeffekttransistoranordnung, Speichereinrichtung und Verfahren zur Herstellung solcher sowie einer 3D-Polysiliziumstruktur
摘要
申请公布号
DE102006045125(B4)
申请公布日期
2011.02.24
申请号
DE200610045125
申请日期
2006.09.25
申请人
QIMONDA AG
发明人
BACH, LARS
分类号
H01L21/336;H01L21/8238;H01L21/8246;H01L27/12;H01L29/78
主分类号
H01L21/336
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代理人
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