发明名称 INTERPOSER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE EMPLOYING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an interposer that improves precision of alignment between a top-surface pattern and a reverse-surface pattern, even if a semiconductor device using an organic substrate as the interposer has a displacement between the top-surface pattern and reverse-surface pattern or a deformation of the substrate itself, and to provide a method of manufacturing the semiconductor device employing the same. <P>SOLUTION: An alignment mark 3 of the interposer is configured such that the alignment mark 3 formed on one principal surface is exposed from the other principal surface through a recess 7. Further, this interposer is used to perform alignment for printing and alignment for division into individual pieces. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011035224(A) 申请公布日期 2011.02.17
申请号 JP20090181214 申请日期 2009.08.04
申请人 NEW JAPAN RADIO CO LTD 发明人 IHARA SEIICHIRO;OGATA TOSHIHIRO;TAIRA TOMOAKI;TERASAKI HIRONORI
分类号 H01L23/32;H01L21/56 主分类号 H01L23/32
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