发明名称 SILICON-GERMANIUM HYDRIDES AND METHODS FOR MAKING AND USING SAME
摘要 The present invention provides novel silicon-germanium hydride compounds, methods for their synthesis, methods for their deposition, and semiconductor structures made using the novel compounds.
申请公布号 KR101014143(B1) 申请公布日期 2011.02.14
申请号 KR20087014947 申请日期 2006.11.21
申请人 发明人
分类号 C01B6/06;C07F7/02;H01L21/205 主分类号 C01B6/06
代理机构 代理人
主权项
地址