| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a diaphragm unit capable of performing correct adjustment of a beam current of particle beams and limiting a beam path unrelated to a module of the particle beams, in a proper manner, and to provide a particle beam device that uses the diaphragm unit. <P>SOLUTION: The particle beam device is equipped with a particle beam generator (2) generating particles; an objective lens (10) focusing the particle beams on a sample (16); first condenser lenses (6, 6a, 6b, 6c) and second condenser lenses (7, 7a, 7b, 7c); a first diaphragm unit (8) arranged between the particle beam generator (2) and the first condenser lenses; and a second diaphragm unit (9) arranged between the first condenser lenses and the second condenser lenses. The first condenser lenses (6) are equipped with a first and a second pole pieces (6a, 6b) adjustable to the second diaphragm unit independently of each other, and the second diaphragm unit separates a first vacuum region, having a first pressure from a second vacuum region having a second pressure as a pressure stage diaphragm. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
