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经营范围
发明名称
WAFER HOLDER
摘要
申请公布号
KR940008241(Y1)
申请公布日期
1994.12.05
申请号
KR19910022916U
申请日期
1991.12.19
申请人
HYUNDAI ELECTRONICS CO., LTD.
发明人
KIM, NAM - JUN;LEE, DU - HWAN
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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