发明名称 Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus
摘要 A holding apparatus adapted to hold an optical element above a base includes at least two held members provided at different positions on an outer periphery of the optical element; and holding members provided above the base for respective held members, the holding members being supported above the base by flexure members. Each held member is held by the corresponding holding member in a kinematic coupling.
申请公布号 US7878665(B2) 申请公布日期 2011.02.01
申请号 US20080032758 申请日期 2008.02.18
申请人 CANON KABUSHIKI KAISHA 发明人 IMOTO KOUHEI
分类号 G03B21/14 主分类号 G03B21/14
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