| 摘要 |
The invention relates to a device and method for fixing glass sheets in a superclean room for feeding a sputter system, comprising the following: a) a roller drive (12), designed to convey a transport frame (19) to a centering unit that centres the transport frame (19) horizontally and to convey the frame from the unit to a sputter system; b) a frame lifting device (7) which lifts and lowers the transport frame (19) in a magnetic rail mounting (2); c) a fixing unit (5, 8) which fixes and releases the trans-port frame (19), opening heads (3) being provided for opening and closing frame clips (17) that receive a glass plate (18); d) a lifting unit for lifting and pivoting said glass plate (18), the unit bringing the plate into a vertical position and placing said plate in the transport frame (9).
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