发明名称 |
LOCALIZED PLASMON TRANSDUCERS AND METHODS OF FABRICATION THEREOF |
摘要 |
<p>A method is presented for use in fabrication of metal islands on an oxide substrate. The method comprises: depositing a selected metal on the oxide substrate by evaporation of said selected metal; and annealing a film of the selected metal on said substrate at temperatures including an annealing temperature being less than 50° C. lower than a glass transition temperature, thereby forming the metal islands partially embedded in said substrate.</p> |
申请公布号 |
EP2276868(A2) |
申请公布日期 |
2011.01.26 |
申请号 |
EP20090732713 |
申请日期 |
2009.04.07 |
申请人 |
YEDA RESEARCH AND DEVELOPMENT COMPANY LTD. |
发明人 |
RUBINSTEIN, ISRAEL;VASKEVICH, ALEXANDER;KARAKOUZ, TATYANA |
分类号 |
C23C14/18;B32B5/16;C23C14/58;G01N21/55 |
主分类号 |
C23C14/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|