| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor production system capable of improving an operation rate of a production facility. SOLUTION: There is provided a semiconductor production system controlling a semiconductor manufacturing device, capable of manufacturing a different kind of semiconductor product, in accordance with a prescribed production schedule, and sequentially producing different kinds of semiconductor products. The system includes a device information receiver 304 for acquiring a production schedule and monitor data monitoring product processing executed by the semiconductor device; a processing time counter 320 for counting, from acquired monitor data, the processing time required for processing the product in the semiconductor manufacturing device; an estimator 326 for estimating subsequent product processing scheduled to be processed next, in accordance with the production schedule; and a pilot instruction device 400 for giving instructions to an operator to execute pilot processing by a pilot wafer that should be executed, prior to the estimated subsequent product processing. COPYRIGHT: (C)2008,JPO&INPIT
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