VISION INSPECTION SYSTEM AND COORDINATE CONVERSION METHOD USING SAME

摘要

The present invention relates to a vision inspection system and to a coordinate conversion method using same. The vision inspection system of the present invention comprises: a table which supports an object to be inspected; a stage which enables the table to linearly reciprocate in the Y-axis direction; a plurality of cameras spaced apart from each other along the X-axis direction to acquire images of the object to be inspected or of the table; a plurality of first marks spaced apart from each other at one end of the table along the X-axis direction and intersecting the Y-axis direction; and a plurality of second marks spaced apart from each other at one side of the table along the Y-axis direction from the leftmost first mark from among the first marks, and spaced apart from each other at the other side of the table along the Y-axis direction from the rightmost first mark from among the first marks. The vision inspection system of the present invention acquires images of the first marks and converts coordinate values of the acquired images into coordinate values of the stage, and acquires images of the second marks and converts coordinate values of the acquired images and coordinate values of the stage into absolute coordinate values based on the object to be inspected. The absolute coordinate values based on the object to be inspected are coordinate values in which the accuracy of the stage is corrected.