| 摘要 |
When currents are applied to driving coils, electromagnetic forces are generated between the currents and magnetic fluxes passing through gaps, a shaft member is swung in one direction, and a tilt angle of a mirror (controlled object) changes relative to a support center point. Electromotive forces generated in detection coils when the magnetic fluxes pass through the detection coils are given as feedback signals to a control unit. The control unit generates currents on the basis of the feedback signals, and applies the currents to the driving coils. By detecting the velocity of the mirror during swinging with the detection coils, the structure of the actuator can be simplified. Further, the responsivity can be increased, and the tilt angle of the mirror can be detected with high accuracy.
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