发明名称 WATER-REACTIVE AL COMPOSITE MATERIAL, WATER-REACTIVE AL FILM, METHOD FOR PRODUCTION OF THE AL FILM, AND STRUCTURAL MEMBER FOR FILM-FORMING CHAMBER
摘要 Provided herein are a water-reactive Al composite material comprising an Al raw material selected from the group consisting of 2NAl to 5NAl each containing Cu as an impurity of Al in an amount of not higher than 40 ppm, and at least one metal selected from the group consisting of In and Bi, in amounts ranging from 2 to 5% by mass and 0.7 to 1.4% by mass, respectively, on the basis of the mass of Al; a water-reactive Al film produced using this composite material; a method for the production of this Al film; and a constituent member for a film-forming chamber, which is provided, on the surface, this water-reactive Al film.
申请公布号 KR20100136558(A) 申请公布日期 2010.12.28
申请号 KR20107026605 申请日期 2009.04.27
申请人 ULVAC, INC. 发明人 KADOWAKI YUTAKA;SAITOU TOMOKO;LIM KENG WENG;MUSHIAKE KATSUHIKO
分类号 C22C21/00;B01J19/00;C23C4/06 主分类号 C22C21/00
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