MEHRSCHLITZSTELLGLIED, TINTENSTRAHLKOPF UND VERFAHREN ZUR HERSTELLUNG DES MEHRSCHLITZSTELLGLIEDS

摘要

This is a method for manufacturing a multislit actuator in which cleaning to drying process is unnecessary, and even slits other than in a linear shape or slits having a width of 50 mu m or less can be formed. A predetermined number of piezoelectric material green sheets 1 are prepared, a first piezoelectric material green sheet 1a is formed with slit apertures by a punch 8 and a die 9 disposed with a stripper 10 therearound. Then the piezoelectric material green sheet 1a is pulled up by the stripper 10 without removing the punch 8 from the piezoelectric material green sheet 1a. Then, a second piezoelectric material green sheet 1b is formed with slit apertures by the punch 8, the punched two piezoelectric material green sheets 1a and 1b are similarly pulled up by the stripper 10 without removing the punch 8 from the piezoelectric material green sheet 1b. After this the piezoelectric material green sheets are laminated at the same time when punched. The operation is repeated for a predetermined number of the sheets, and then they are stacked on a substrate and fired to integrate in a unitary body.