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发明名称
Manufacturing method for electrode of electro static chuck
摘要
申请公布号
KR101001644(B1)
申请公布日期
2010.12.15
申请号
KR20080108340
申请日期
2008.11.03
申请人
发明人
分类号
H01L21/687;H01L21/683
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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