| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alignment technique capable of further improving registration. <P>SOLUTION: An alignment device calculates misregistration between both objects based on a superimposed image being an overlapping image of first and second patterns arranged on both the objects, and corrects the misregistration by driving both the objects relatively. The superimposed image has a first periodic concentration change (moire) generated by superimposing a first line group (pitch p1) of the first pattern and a second line group (pitch p2) of the second pattern, and also has a second periodic concentration change generated by superimposing a second line group of the first pattern and a first line group of the second pattern. A calculation means of the alignment device obtains two approximate curves approximating the two periodic concentration changes by image processing, and calculates misregistration between both the objects based on the misregistration between the two approximate curves. <P>COPYRIGHT: (C)2011,JPO&INPIT |
