发明名称 Bonding method of semiconductor substrate and sheet, and manufacturing method of semiconductor chips using the same
摘要 A semiconductor substrate is bonded to a joining face of a sheet and is dividable along predetermined dividing lines of the semiconductor substrate by expanding the sheet so as to form semiconductor chips. A bonding layer for bonding a substrate face of the semiconductor substrate and the joining face of the sheet to each other can be formed in each region encircled with the predetermined dividing lines, between the substrate face and the joining face of the sheet. Thus, when the substrate face of the semiconductor substrate and the joining face of the sheet are bonded to each other, the bonding layer does not reach any of the predetermined dividing lines set between the regions. The bonding layer can be formed in dotted segments or a pattern of lattice between the substrate face of the semiconductor substrate and the joining face of the sheet.
申请公布号 US7838396(B2) 申请公布日期 2010.11.23
申请号 US20060594898 申请日期 2006.11.09
申请人 DENSO CORPORATION 发明人 MARUYAMA YUMI;ASAI MAKOTO
分类号 H01L21/00 主分类号 H01L21/00
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