METHOD OF REGENERATING SHRINKING SOLUTION USED IN THE MANUFACTURE OF WIPING CLOTH FOR CLEANING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A method of regenerating a shrinking solution used in the fabrication of wiping cloth for cleaning a semiconductor device is provided to solve waste water problems by increasing the use frequency of the shrinking solution in the fabrication of wiping cloth. CONSTITUTION: The complex fiber structure 50-200 weight of two component complex fibers of a polyamide polymer component(B) and a polyester polymer component(A) is dipped into a shrinking processing solution. The complex fiber structure is shrunk and removed. A supplement solution is added to the shrinking solution. While keeping the emulsification state of the shrinking processing liquid, the shrinking ability of the shrinking processing liquid is recovered. Other complex fiber structure 50-200 weight is dipped in the shrinking processing liquid.