| 摘要 |
PROBLEM TO BE SOLVED: To provide a stocker system capable of easily inspecting the flatness of a shelf of a stocker, and to provide a method for managing the stocker. SOLUTION: This stocker system includes the stocker 100 with the shelf 110 capable of stacking objects to be stacked, a rack master 200 with a body 210 and an arm part 230 connected to the body so as to move the objects to be stacked to the stocker side, and a sensor unit 300 formed so as to be stacked on the arm. The sensor unit 300 includes a plurality of displacement sensors arranged so as to measure the mutual positional relationship between the sensor unit and the shelf at a plurality of points when it is moved above the shelf in a state of being stacked on the arm. COPYRIGHT: (C)2011,JPO&INPIT |
