UNIT FOR CLEANING GLASS SUBSTRATE AND SYSTEM FOR CLEANING GLASS SUBSTRATE HAVING THE SAME

摘要

PURPOSE: A unit for cleaning a glass substrate and a system for cleaning a glass substrate with the same are provided to effectively remove for foreign materials from a TFT-LCD cell surface. CONSTITUTION: Conveyer units(12,32,42,100) horizontally return a glass substrate. Cleaning units(200) are installed on a moving route of a glass substrate returned by the conveyor unit. A scrubbing member removes foreign materials from the surface of a glass substrate by a scrubbing force. A shaft is rotated by a driving motor.