| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for melting silicon capable of detecting impurity concentration at a melting state in real time and an apparatus and a method for refining silicon using the same. SOLUTION: The apparatus for melting silicon is equipped with a first chamber with a crucible holding molten silicon, a second chamber connected with the first chamber via an openable and closable member and a rotating cooling body movable inside the first chamber and the second chamber. A mechanism to detect the concentration of impurities contained in solidified silicon formed by immersing at least a part of the rotating cooling body into the molten silicon is characterized by being set inside the second chamber. COPYRIGHT: (C)2011,JPO&INPIT
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