| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coater which allows the inside of a coating nozzle to be cleaned within the process in a manufacturing process flow of a color filter. SOLUTION: The slit coater including a coating head applies a coating solution supplied into the coating head, to a substrate, and a cleaning solution is supplied into the coating head and is discharged to clean the inside of the coating head, and clean dry air is supplied into the coating head after cleaning and is discharged to dry the inside of the coating head. COPYRIGHT: (C)2011,JPO&INPIT
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