发明名称 MOVING UNIT AND STAGE MOVING APPARATUS HAVING THE SAME
摘要 PURPOSE: A transfer unit and a transfer apparatus including the same are provided to ensure stable contact between transfer unit moving blocks because each moving block has a part for receiving adjacent moving block. CONSTITUTION: A transfer unit(300) arranged on a base of a transfer apparatus comprises a transfer unit beam(310), a plurality of transfer unit moving blocks(320), and a transfer unit actuator(330). The transfer unit moving blocks are arranged on the transfer unit beam and allowed to move. The transfer unit actuator supports the transfer unit moving blocks to move on the transfer unit beam. A crossing zone for the transfer unit moving blocks is formed on a plane vertical to the travel direction of the moving blocks.
申请公布号 KR20100117421(A) 申请公布日期 2010.11.03
申请号 KR20090036173 申请日期 2009.04.24
申请人 JUSTEK CORPORATION 发明人 KIM, YONG YIL;CHO, SUNG HOON
分类号 B23Q5/22;B23Q5/34 主分类号 B23Q5/22
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