| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new detection device improved in terms of bulkiness. <P>SOLUTION: A thermo-imaging microelectronic device includes: a support (200); a plurality of metal levels (M<SB>1</SB>, ..., M<SB>5</SB>, M<SB>6</SB>) interconnecting electronic components formed on the support; an array of heat detectors formed on the support, each detector including a film (210) with which radiant energy may be absorbed and one or more electric signals may be supplied depending on the absorbed radiant energy; and reading means integrated to the support for reading the electric signals from the films. At least several of the detectors each comprise a reading means equipped with an integrator comprising at least one integration capacitor (C<SB>1</SB>) formed opposite to the film. The capacitor comprises at least one upper plate (244) made at a given interconnection metal level out of the plurality of interconnection metal levels (M<SB>1</SB>, ..., M<SB>5</SB>, M<SB>6</SB>). <P>COPYRIGHT: (C)2011,JPO&INPIT |
