发明名称 |
CATALYST-AIDED CHEMICAL PROCESSING METHOD |
摘要 |
A catalyst-aided chemical processing method is a novel processing method having a high processing efficiency and suited for processing in a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: immersing a workpiece in a processing solution in which a halogen-containing molecule is dissolved, said workpiece normally being insoluble in said processing solution; and bringing a platinum, gold or ceramic solid catalyst close to or into contact with a processing surface of the workpiece, thereby processing the workpiece through dissolution in the processing solution of a halogenide produced by chemical reaction between a halogen radical generated at the surface of the catalyst and a surface atom of the workpiece.
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申请公布号 |
US2010273381(A1) |
申请公布日期 |
2010.10.28 |
申请号 |
US20100832194 |
申请日期 |
2010.07.08 |
申请人 |
YAMAUCHI KAZUTO;SANO YASUHISA |
发明人 |
YAMAUCHI KAZUTO;SANO YASUHISA |
分类号 |
B32B5/02;B32B15/08;B32B18/00 |
主分类号 |
B32B5/02 |
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