| 摘要 |
PURPOSE: An image centering method is provided to minimize a delay time in searching a inspection area by minimizing the motions during search. CONSTITUTION: An image centering method comprises steps of: photographing a target object with an optical system of a first magnification, setting a inspection area in the first magnification image and registering it as a model image(S10), photographing the target object with an optical system of a second magnification higher than the first magnification to obtain a target image, reducing the target image to a size of the first magnification and registering it as an inspection image(S20), searching for the inspection image from the model image(S30), and moving the target object or the second magnification optical system to correspond to the position of the set inspection area when the inspection image is searched(S40).
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