| 发明名称 |
LIGHT IRRADIATION APPARATUS FOR EXPOSURE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD |
| 摘要 |
<p>PURPOSE: A light irradiation apparatus for an exposure apparatus, the exposure apparatus, and an exposure method are provided to arrange all light sources on the same curved face by using a cassette. CONSTITUTION: A light source(73) includes an optical reflection system having the directivity of light. A plurality of cassettes(81) mount a certain number of light source. The cassettes include a light source support. A frame(91) mounts the plural cassettes. The frame includes a plurality of cassette mounting units.</p> |
| 申请公布号 |
KR20100112511(A) |
申请公布日期 |
2010.10.19 |
| 申请号 |
KR20090103633 |
申请日期 |
2009.10.29 |
| 申请人 |
NSK LTD. |
发明人 |
HARADA TOMONORI;NAGAI SHINICHIROU;KARUISHI SHUSAKU |
| 分类号 |
H01L21/027;F21V29/67 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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