METHOD FOR COLLECTION OF HEXACHLORODISILANE AND PLANT FOR THE METHOD

摘要

Disclosed is a method for collecting hexachlorodisilane which is produced as a by-product in the production of trichlorosilane from tetrachlorosilane and hydrogen. The method comprises the steps of: reacting a raw material gas composed of vaporized trichlorosilane and hydrogen at a temperature ranging from 700 to 1400°C to yield a reaction product gas; cooling the reaction product gas to a temperature ranging from 30 to 60°C to yield a cooled condensate solution containing hexachlorodisilane; and concentrating and collecting a high-boiling-point material containing hexachlorodisilane from the cooled condensate solution.